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Title: Introduction to Metrology Applications in IC Manufacturing Condition: New Author: Eric Solecky, Alok Vaid, Bo Su Format: Paperback EAN: 9781628418118 ISBN: 9781628418118 Publisher: SPIE Press Genre: Technology & Engineering Release Date: 11/30/2015 Description: Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis—specifically, precision, matching, and relative accuracy. Language: English Country/Region of Manufacture: US Item Height: 229mm Item Length: 152mm Item Weight: 380g Book Series: Tutorial Texts Release Year: 2015 Missing Information?
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