Further Details

Title: Introduction to Metrology Applications in IC Manufacturing
Condition: New
Author: Eric Solecky, Alok Vaid, Bo Su
Format: Paperback
EAN: 9781628418118
ISBN: 9781628418118
Publisher: SPIE Press
Genre: Technology & Engineering
Release Date: 11/30/2015
Description: Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis—specifically, precision, matching, and relative accuracy.
Language: English
Country/Region of Manufacture: US
Item Height: 229mm
Item Length: 152mm
Item Weight: 380g
Book Series: Tutorial Texts
Release Year: 2015

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