TEL Tokyo Electron 4 Nozzle COT Coat Process Assembly 5087-403836-12 Lithius Working

Inventory # A-16223

  • Model No: 4 Nozzle COT Coat Process Assembly
  • COT Coat Process Station
  • Removed from a TEL Tokyo Electron Clean Track Lithius System

    Parts List (approximation, some parts may vary)

    Assembly Part No: 5087-403836-12 NOZZLE(1-4) ASSY

  • 2910-426487-11 GASKET 1
  • 5004-300018-11 TIP,NOZZLE (509510025912 1
  • 5003-400002-11 STOPPER,CUT 1
  • 5004-400027-11 NUT,BLOCK (509510042511 2
  • 5004-400053-11 PLATE (509510101211 1
  • 5004-200006-11 CASE,LOW (509510063011 1
  • 5004-200005-11 CASE,UPR (509510062911 1
  • 5004-400013-11 COVER,MAGNET (509510036311 1
  • 5003-300026-11 BLOCK(2),JUNCTION 1
  • 5010-405489-11 TUBE SLEEVE 1
  • 5010-405493-11 PACKING 1
  • 5004-300019-11 JOINT (509510033211 1
  • 5004-300017-11 BODY (509510033311 1
  • 017-000214-1 TUBE,TEFLON NO.900-PTFE 4*3*0.5 3
  • 5017-000020-11 TUBE,POLYURETHANE U2-4-7.5*6 TRANSPARENT 20000L1
  • 017006386-1 HOSE SNACLE HOSE 9*13 L1=1700 L2=40 1
  • 5037-000001-11 MAGNET ELECTROMAGNET 1
  • 047-003506-1 DUCT,WIRING,FLEX TKP0250-15BR37-3L 1
  • 047-003175-1 #BRACKET TKP0250-15B PKA 1
  • 036-007024-1 #MAGNET TZ-0079 1
  • 5024-000074-11 FLTG JOINT TC4N4-TY02 1
  • 027-101580-1 O-RING NYTRYL S-18 BLACK 1
  • 027-101503-1 O-RING NYTRYL S-10 BLACK 2
  • 020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW 4
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS3044
  • 020-000005-1 CAP SCREW M3*6 SUS304 6
  • 020-000417-1 CAP SCREW M2*10 SUS304 2
  • 020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS3042
  • 020-000414-1 CAP SCREW M2*4 SUS304 2
  • 020-001178-1 CAP SCREW M3*30 SUS304 4
  • 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS3042
  • 032-000054-1 SPRING WASHER M3 SUS304 4
  • 020-000020-1 CAP SCREW M3*20 SUS304 4
  • 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE 4
  • 5086-404224-11 ELECTROMAGNET,COT #22 1

    Assembly Part No: 5087-403837-12 NOZZLE(6-10) ASSY

  • 2910-426487-11 GASKET 1
  • 5004-300018-11 TIP,NOZZLE (509510025912 1
  • 5003-400002-11 STOPPER,CUT 1
  • 5004-400027-11 NUT,BLOCK (509510042511 2
  • 5004-400053-11 PLATE (509510101211 1
  • 5004-200006-11 CASE,LOW (509510063011 1
  • 5004-200005-11 CASE,UPR (509510062911 1
  • 5004-400013-11 COVER,MAGNET (509510036311 1
  • 5003-300026-11 BLOCK(2),JUNCTION 1
  • 5010-405489-11 TUBE SLEEVE 1
  • 5010-405493-11 PACKING 1
  • 5004-300019-11 JOINT (509510033211 1
  • 5004-300017-11 BODY (509510033311 1
  • 017-000214-1 TUBE,TEFLON NO.9003-PTFE 4*3*0.5 3104 5017-000020-11 TUBE,POLYURETHANE U2-4-7.5*6 TRANSPARENT 20000L1
  • 017-006385-1 HOSE SNACLE HOSE 9*13 L1=1600 L2=40 1
  • 5037-000001-11 MAGNET ELECTROMAGNET 1
  • 047-003506-1 DUCT,WIRING,FLEX TKP0250-15BR37-3L 1
  • 047-003175-1 #BRACKET TKP0250-15B PKA 1
  • 036-007024-1 #MAGNET TZ-0079 1
  • 5024-000074-11 FLTG JOINT TC4N4-TY02 1
  • 027-101580-1 O-RING NYTRYL S-18 BLACK 1
  • 027-101503-1 O-RING NYTRYL S-10 BLACK 2
  • 020-000579-1 CAP SCREW M3*25 SUS304 FULL SCREW 4
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS3044
  • 020-000005-1 CAP SCREW M3*6 SUS304 6
  • 020-000417-1 CAP SCREW M2*10 SUS304 2
  • 020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS3042
  • 020-000414-1 CAP SCREW M2*4 SUS304 2
  • 020-001178-1 CAP SCREW M3*30 SUS304 4
  • 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS3042
  • 032-000054-1 SPRING WASHER M3 SUS304 4
  • 020-000020-1 CAP SCREW M3*20 SUS304 4
  • 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE 4
  • 5086-404229-11 ELECTROMAGNET,COT #27 1

    Assembly Part No: 5085-405248-14 BLOCK ASSY,NOZZLE

  • 5010-403579-11 BLOCK 1
  • 5004-300076-11 BRACKET,BLOCK (509510071411 1
  • 036-007024-1 #MAGNET TZ-0079 1
  • 020-000417-1 CAP SCREW M2*10 SUS304 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 3
  • 020-000414-1 CAP SCREW M2*4 SUS304 2

    Assembly Part No: 5085-405334-12 JOINT ASSY(A),NOZZLE

  • 5024-000031-11 #JOINT MA210-AM3-X276A 1
  • 020-001234-1 CAP SCREW M2.6*8 SUS304 2
  • 020-002675-1 CAP SCREW M2.6*14 SUS304 1

    Assembly Part No: 5085-405335-12 JOINT ASSY(B),NOZZLE

  • 5024-000032-11 #JOINT MA210-AM3-X276B 1
  • 020-001234-1 CAP SCREW M2.6*8 SUS304 2
  • 020-002675-1 CAP SCREW M2.6*14 SUS304 1

    Assembly Part No: 5085-405336-12 JOINT ASSY(C),NOZZLE

  • 5024-000033-11 #JOINT MA210-AM3-X276C 1
  • 020-001234-1 CAP SCREW M2.6*8 SUS304 2
  • 020-002675-1 CAP SCREW M2.6*14 SUS304 1

    Assembly Part No:

  • 5010-203077-12 COVER,RIGHT 1
  • 5004-400007-11 RAIL (509510025211 4
  • 026-101487-1 GROMMET C-30-BW-19-1 3
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER9
  • 020-000009-1 CAP SCREW M3*10 SUS304 8
  • 5086-400697-11 SWITCH,PROXIMITY COT #01 1

    This TEL Tokyo Electron 4 Nozzle COT Coat Process Assembly is used working surplus. The physical condition is good, but there are signs of previous use and handling.

    • Sale Details

    • Item Condition: Used Working, 90 Day Warranty
    • Estimated Packed Shipping Dimensions: L x W x H = 32"x24"x24" @ 30 lbs.
    • Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
    • For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
    • Items are sold with a 90-Day Satisfaction Guarantee

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