TEL Tokyo Electron 300mm ADH Adhesion Process Station No Plate Lithius Spare
Inventory # A-19763
Model No: ADH Adhesion Process Station
Removed from a TEL Tokyo Electron Clean Track Lithius System
Sold As-Is
Made in Japan
Installed Components
RKC Instrument Part No: REX-B875-CS1A2
PCB Part No: HTE-MC2-B-12, BOARD, CONN HPB #01, TMB2101
PCB Part No: HTE-TC1-B-12, BOARD, IF TC CTRL #01, TMB2000
Parts List (approximation, parts may vary or not be included or installed)
Assembly Part No: 5087-401692-19 BASE(HP) ASSY,BACK
5010-101312-12 FRAME (Qty.1)
5003-300048-11 BRACKET(R) (Qty.1)
5010-405342-11 PLATE (Qty.1)
5003-300047-11 BRACKET(L) (Qty.1)
5010-405930-11 BRACKET (Qty.1)
5010-405344-11 COLLAR (Qty.1)
5010-306424-11 COVER (Qty.1)
5010-407435-11 SEAL (Qty.2)
5003-200013-11 DUCT(R) (Qty.1)
5003-200012-11 DUCT(L) (Qty.1)
5010-309775-11 PLATE (Qty.2)
5003-300040-11 PORT 2
5010-309520-11 SHUTTER(R) (Qty.1)
5010-309519-11 SHUTTER(L) (Qty.1)
5010-404625-11 PLATE (Qty.2)
5010-407356-11 BRACKET (Qty.2)
5010-404632-11 SUPPORT,PIN (Qty.1)
5010-405346-11 BRACKET (Qty.1)
5010-405347-11 SEAL (Qty.1)
5010-405348-11 SEAL (Qty.1)
5010-406157-11 PLATE (Qty.1)
5010-406155-11 PLATE (Qty.1)
5010-406158-11 PLATE (Qty.1)
5010-406156-11 PLATE (Qty.1)
5010-407046-11 PLATE (Qty.2)
5010-405582-11 PACKING (Qty.2)
5086-403977-11 SENSOR,CYLINDER ADH U/D #02 (Qty.1)
5086-400794-11 SENSOR,PROXIMITY ADH #01 (Qty.1)
5086-401786-11 SENSOR,PROXIMITY ADH #02 (Qty.1)
5086-400797-12 SENSOR,THERMOSTAT LHP #01 (Qty.1)
5041-000236-11 CABLE ASSY 1746253-3(THERMO EXT #03) (Qty.1)
5018-000014-11 LM GUIDE LS200118ALK1 (Qty.2)
020-006514-1 CAP SCREW CBSST6-12 (Qty.1)
5024-000080-11 AIR CYLINDER SSD-T1L2550-X09 (Qty.1)
028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 (Qty.2)
028-003339-1 FITTING,TUBE M-5HL-6 (Qty.2)
026-007246-1 SPACER WSSS5-3-1 (Qty.8)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty.20)
020-001091-1 CAP SCREW M4*16 SUS304 (Qty.8)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty.11)
020-000012-1 CAP SCREW M3*12 SUS304 (Qty.2)
020-000057-1 CAP SCREW M5*12 SUS304 (Qty.8)
020-001167-1 CAP SCREW M5*10 SUS304 (Qty.8)
020-000090-1 CAP SCREW M6*20 SUS304 (Qty.4)
020-000030-1 CAP SCREW M4*8 SUS304 (Qty.4)
032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND (Qty.1)
026-102041-1 SET PLATE TM-147-1-5563 WASHER (Qty.2)
020-000009-1 CAP SCREW M3*10 SUS304 (Qty.4)
020-000414-1 CAP SCREW M2*4 SUS304 (Qty.2)
020-001126-1 SET SCREW M4*5 SUS304 (Qty.2)
032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND (Qty.9)
Assembly Part No: 5087-401608-12 PIN(ADH) ASSY
5010-305466-11 BASE,PIN (Qty.1)
5010-311607-11 BRACKET (Qty.1)
5010-404667-11 PLATE (Qty.1)
5010-400930-11 COLLAR (Qty.1)
5010-404577-11 ROD (Qty.1)
5010-401163-11 PLATE (Qty.1)
5010-307257-11 PLATE (Qty.1)
5010-306713-11 BLOCK (Qty.1)
5086-403976-11 SENSOR,CYLINDER ADH U/D #01 (Qty.1)
5003-400007-11 PIN(56) (Qty.3)
026-005603-1 SPACER WSSS10-4-1 (Qty.1)
5024-000079-11 AIR CYLINDER SSD-T1L1623-X06 (Qty.1)
5018-000011-11 LM GUIDE LS150080CLK1 (Qty.1)
028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 (Qty.2)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty.2)
020-000510-1 CAP SCREW M2.6*10 SUS304 (Qty.3)
020-000032-1 CAP SCREW M4*10 SUS304 (Qty.7)
020-000642-1 CAP SCREW M3*55 SUS304 (Qty.4)
020-002059-1 SET SCREW M3*5 SUS304 (Qty.2)
020-000519-1 CAP SCREW M3*16 SUS304 (Qty.2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty.2)
020-001093-1 CAP SCREW M4*14 SUS304 (Qty.2)
032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE (Qty.4)
Assembly Part No: 5085-407303-12 SUPPORT(ADH) ASSY
5010-101307-11 RING(ADH),SUPPORT (Qty.1)
2910-437210-11 PACKING (Qty.1)
2910-420314-11 PACKING (Qty.1)
2910-303824-13 SEAL (Qty.1)
5010-203089-11 FLANGE (Qty.1)
5010-305464-11 PLATE (Qty.1)
5010-403103-11 PACKING (Qty.1)
5010-405457-11 PLATE (Qty.2)
028-002124-1 FITTING,TUBE F900-AT-6.35A (Qty.6)
028-002197-1 FITTING,TUBE F900-H-6.35A (Qty.1)
028-002257-1 FITTING,TUBE F900-L-6.35 (Qty.5)
028-002302-1 FITTING,TUBE F900-T-6.35 (Qty.5)
028-006637-1 FITTING,RESIN EUT1/4-C1 (Qty.1)
020-000057-1 CAP SCREW M5*12 SUS304 (Qty.12)
020-000020-1 CAP SCREW M3*20 SUS304 (Qty.6)
020-001089-1 CAP SCREW M3*14 SUS304 (Qty.6)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty.12)
027-000431-1 O-RING BYTON AS568-251 BLACK (Qty.2)
020-000030-1 CAP SCREW M4*8 SUS304 (Qty.4)
Assembly Part No: 5087-401362-16 BASE(E-ADH) ASSY
5010-306409-11 COVER (Qty.1)
5010-308906-11 BRACKET (Qty.1)
5010-202625-11 COVER (Qty.1)
5010-404767-11 COVER (Qty.1)
5010-404768-11 COVER (Qty.1)
5010-405337-11 BRACKET (Qty.1)
5010-404318-11 BRACKET (Qty.1)
5010-306706-11 PAN,DRAIN (Qty.1)
5010-101124-11 COVER (Qty.1)
5010-308904-11 BLOCK (Qty.1)
5010-308910-11 BRACKET (Qty.1)
5010-101517-11 BASE (Qty.1)
5003-200010-11 PLATE,COOL (Qty.1)
5010-307207-11 PLATE (Qty.1)
5010-303511-11 PLATE (Qty.1)
5010-403503-11 PLATE (Qty.1)
5010-407044-11 BRACKET (Qty.1)
5010-202632-11 PIPE (Qty.1)
5010-308907-11 SEAT (Qty.1)
5010-405219-11 TUBE (Qty.1)
5041-000255-12 CABLE ASSY 1717319-7 (ADH EXT #01) (Qty.1)
5086-400795-11 CABLE,ADH SIG #01 (Qty.1)
5086-400798-11 SENSOR,PRESS ADH VAC #01 (Qty.1)
5086-401787-12 CABLE,ADH EXT #04 (Qty.1)
5086-402006-11 CABLE,GND ADH #02 (Qty.1)
5014-000001-11 ACOUSTIC UNIT REX-B875-CS1 (Qty.1)
5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) (Qty.1)
5044-000007-11 PCB,I/F TMB2101(BOARD,CONN HPB #01) (Qty.1)
5041-000228-11 CABLE ASSY 1717338-1 (DC ADH PWR #01) (Qty.1)
5041-000232-11 CABLE ASSY 1717320-1 (ADH EMO #01) (Qty.1)
5086-400802-11 CABLE,ADH EMO #02 (Qty.1)
5086-401627-11 CABLE,GND ADH #01 (Qty.1)
5010-407045-11 BRACKET (Qty.2)
5010-402221-11 HOLDER (Qty.1)
028-004347-1 FITTING,TUBE KJL06-01S (Qty.3)
028-004353-1 FITTING,TUBE KJU06-00 (Qty.1)
028-017536-1 FITTING,TUBE IN-233-1369 (Qty.1)
024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 (Qty.6)
5012-000021-11 SOLENOID VALVE SS5Y3-03-X1236 (Qty.1)
5012-000069-11 AIR OPERATION VALVE AMG01-8BUR-X0421-T (Qty.1)
028-003337-1 FITTING,TUBE M-5H-4 (Qty.3)
028-003338-1 FITTING,TUBE M-5HL-4 (Qty.3)
020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE (Qty.3)
044-000044-1 SUPPORT,PCB EM-3 (Qty.8)
026-006336-1 SPACER FWSSS-D5-V3-T1.3 (Qty.2)
020-001178-1 CAP SCREW M3*30 SUS304 (Qty.4)
020-000517-1 CAP SCREW M3*3 SUS304 (Qty.16)
020-001186-1 CAP SCREW M3*35 SUS304 (Qty.4)
020-000042-1 CAP SCREW M4*20 SUS304 (Qty.2)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty.10)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty.8)
020-000032-1 CAP SCREW M4*10 SUS304 (Qty.13)
020-002601-1 BAIND SCREW M3*4 SUS304 (Qty.4)
028-002157-1 FITTING,TUBE F900-F-9.52 (Qty.1)
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
028-006338-1 FITTING,TUBE EC4-M5A-TR (Qty.2)
032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE (Qty.2)
017-002651-1 TUBE PFA-HG L 6.35*4.35-200*500 (Qty.2)
032-000016-1 WASHER,TOOTHED LOCK M4 SUS EXT (Qty.1)
020-000657-1 CAP SCREW M4*4 SUS304 (Qty.1)
028-002152-1 FITTING,TUBE F900-F-6.35 (Qty.2)
028-006361-1 FITTING,TUBE EUC6-TR (Qty.3)
028-005698-1 FITTING,TUBE BC6 (Qty.2)
032-000011-1 FLAT WASHER M4 SUS304 POLISHED ROUND (Qty.1)
Assembly Part No: 5085-407298-13 CHAMBER(ADH) ASSY
5010-101192-11 CHAMBER (Qty.1)
5010-202745-11 NOZZLE (Qty.1)
5010-404889-11 PLATE (Qty.1)
5010-202646-11 BRACKET (Qty.1)
5010-405338-11 SHAFT (Qty.4)
5010-405339-11 COLLAR (Qty.4)
5010-401175-11 PLATE (Qty.4)
5010-405602-11 SPACER (Qty.4)
5010-405340-11 BRACKET (Qty.1)
5010-202627-11 ARM(L) (Qty.1)
5010-203123-11 ARM(R) (Qty.1)
5010-309220-11 BRACKET(R) (Qty.1)
5010-309221-11 BRACKET(L) (Qty.1)
5010-407238-11 PLATE (Qty.2)
5010-405691-11 BRACKET (Qty.1)
5010-405729-11 BLOCK (Qty.1)
027-000088-1 O-RING BYTON AS568-023 BLACK (Qty.1)
5036-000001-11 #MAGNET TZ-0082 (Qty.1)
020-000020-1 CAP SCREW M3*20 SUS304 (Qty.6)
020-000417-1 CAP SCREW M2*10 SUS304 (Qty.2)
020-000028-1 CAP SCREW M4*6 SUS304 (Qty.6)
020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
020-001116-1 CAP SCREW M5*8 SUS304 (Qty.4)
020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304
Assembly Part No: 5085-408278-14 COVER(ADH)ASSY,BACK
5010-307662-11 BASE,PANEL (Qty.1)
5010-306689-11 PANEL (Qty.1)
5010-306690-11 PLATE,NUT (Qty.1)
5010-306691-11 PLATE,NUT (Qty.1)
5010-307111-11 PACKING (Qty.1)
5010-405584-11 LEVER (Qty.2)
5010-406153-11 BASE,HOLDER (Qty.1)
5010-406150-11 HOLDER (Qty.1)
5010-406148-11 PACKING (Qty.1)
5010-406149-11 PACKING (Qty.1)
5010-308897-11 PANEL (Qty.1)
026-007272-1 SPACER FWSSS-D5-V3-T1.5 (Qty.5)
020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P0287
026-002709-1 HANDLE A-67 (Qty.1)
020-000005-1 CAP SCREW M3*6 SUS304 (Qty.2)
020-000518-1 CAP SCREW M3*4 SUS304 (Qty.4)
020-002603-1 BIND SCREW M3*10 SUS304 (Qty.13)
020-000414-1 CAP SCREW M2*4 SUS304 (Qty.2)
020-000034-1 CAP SCREW M4*12 SUS304 (Qty.2)
This TEL Tokyo Electron 300mm ADH Adhesion Process Station is used untested surplus and is being sold as-is. The unit is missing the ADH Plate and lift (see (photos). The physical condition is good and there are visible signs of previous use and handling.
Sale Details
- Item Condition: Untested Surplus, Sold As-Is
- Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14" @ 80 lbs.
- Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes.
- Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
- For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
- Items are sold with a 90-Day Satisfaction Guarantee
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