Product Series Overview

Microvision 2 Flexible, Integration-ready Residual Gas Analyzer

Technical Specs

• Type
  Residual Gas Analyzer
• Measurement Technique
  Mass Spectrometry
• Mass Range
  100, 200, or 300 amu
• Detector
  Faraday
• Faraday
  1.5e^-11 Torr (2e^-11 mbar)
• Filaments
  Tungsten or Thoria coated Iridium
• Software
  Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software, EasyView, Process Eye Professional and TOOLweb RGA Windows software packages for Windows 2000, XP, or Vista
• Maximum Analyzer Operating Pressure
  7.6e^-5 Torr (1e^-4 mbar)
• Ion Source Sensitivity
  2e^-4 A/mbar
• Resolution
  Better than 10% valley for peaks of equal height across mass range
• Bake Out Temperature
  250°C (with extender or electronics removed)
• Operating Temperature
  200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e^-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e^-5 mbar
• Cross Beam Ion Source
  Single, double, or triple, depending on configuration.
• UHV Ion Source
  Single, double, or triple, depending on configuration.
• UHV Out-gassing Rate
  <1e^-9 mbar -l/s
• PVD Ion Source
  Single, double, or triple, depending on configuration.
• Zero Blast Effect
  Double & Triple Filter: <5 ppm baseline levels next to mass 2 (not applicable with 5 in. single version)
• Maximum Operating Conditions
  10 - 40°C, 80% RH (non condensing)

• Microchannel plate
  3.8e^{-14 Torr (5e-14 mbar)}
• Single channel EM
  7.6e^-15 Torr (1e^-14 mbar) triple configuration only
• Electronics Weight on Flange
  1.7 kg
• Power
  24 VDC, 3A external universal voltage supply (included)
• Data Acquisition Method
  Dedicated real time acquisition processor
• Data Acquisition Speed
  <3 ms per point for analog scanning
• Data Collection Methods
  Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan, Complete recipe control to link multiple acquisition into a single scan, (Process Eye Professional and TOOLweb RGA only)
• Settling Time
  <20 ms (to 1 ppm of Maximum Signal)
• Control Method
  CE operating system processor with web-server interface
• Command Structure
  Documented ASCII command protocols
• Multiplier Protection
  Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature or over-pressure and x-trip filament and multiplier protect for over-pressure
• Communication
  10/100 Base-T Ethernet, static or automatically assigned IP addresses
• Interfaces
  RJ45 socket: 10/100 Base-T Ethernet, 25 way D-type female: 16 configurable TTL I/O, one dedicated multiplier over temperature inhibit input, includes power for ±15V (100 mA), +24V (100 mA) and ±3.3V (100 mA), 15 way D-type female: 4 analog in (-11 - 11 V, 22 bit), 2 analog outputs (0 - 10V, 12 bit), includes power for ±15 V (100 mA), compound output from detector pre-amplifier, 9 way D-type female dedicated vacuum gauge port: -11 - 11 V 22 bit analog input, 1 digital input (gauge OK), 1 digital output (gauge enable) and gauge power +24 V (100mA), 3.5 mm jack socket: Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe, 2.5 mm jack socket: Audio output for use with speaker and wired or wireless headphones
• Number of Stored Source Settings
  6 sets including ion source parameters, alignment, resolution, detector calibrations, Stored in electronics and recalled by EasyView, Process Eye Professional or TOOLweb RGA
• Software Controlled Tuning Parameters
  Electron energy, 20 - 100 eV, Emission current, 0 - 2 mA (5 mA degas), Ion energy, 0 - 10 V, Ion extraction, 0 to -130V, Filter pole bias, 0 to -10 to +10 V
• Mounting Flange
  DN 40 CF-F
• Compliance
  Compliant to RoHS Directive 2002/95/EC (control unit)