This is a used MFC controller that is fully operational and in good working order. It came of a dry etcher that was getting process gas upgrades for new etching process recipes. This MFC has been purged with argon (Ar) gas prior to removal of tool to ensure safety and handling. If there are any problems with this unit, please don't hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help.
CRITERION D500
Pressure Insensitive Mass Flow Module
This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.
The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal.
Pressure Insensitive PerformanceA new high-performance Pressure Insensitive function provides a simplified gas supply system
Multi-range, multi-gas, multi-pressure solution
The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range
G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function
The advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput
High Accuracy
Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment
Fast Response
Response: < 0.8 second
Accurate, stable flow control can be achieved
Dynamic Range
Wide control range: 0.2% F.S. to 100% F.S.