NEW Hitachi SAM SFC1480FMC-4VLZ24 5% B2H6/95% N2 200 SCCM Mass Flow Controller (MFC), Novellus PN: 22-193560-00
Comes with what you see in the pictures. If you don't see it, you probably won't get it.
Specifications are from Hitachi Metals and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
This MFC is brand-new, old stock from surplus Novellus inventory.

The Unit's Serial Number Tag Reads:
Model Number: SFC1480FMC-4VLZ24
Serial Number: 2D1984
Device No: 00
Gas: 5%B2H6/N2
Calibration Factor: 0.940
Flow Rate: 200 SCCM
Part Number: 22-193560-00

Novellus Part Number: 22-193560-00

Breakdown by Part Number:
Series: 148
Flow Range: 200 SCCM
Seal Material: Metal
Operation: Normally Closed
Fittings: 1/4" HMJ (UJR) male
Mounting Position: Vertical Inlet Down
Connector: D-sub 9-pins (Valve open/closed-connected to ±15 VDC type)
Face-to-Face Dimensions: 124 mm

Features:

  • Original digital control method is applied.
  • Quick response
  • High accuracy by digital multi-point calibration.
  • Face-to-face dimensions
  • Monitoring of operation using digital interface is possible.
  • Simple valve structure

    • Specifications:
    Model: Conventional
    Standard Full Scale Flow Rate (N2 Equivalent): 200 sccm
    Valve Operation: Normally closed
    Operation Pressure:
      Inlet: 0.05 - 0.3 MPa (Gauge)
      Outlet: Vacuum-atmospheric pressure
    Flow Control Range: 2 - 100% of full scale
    Accuracy: ±0.5% of full scale
    Response Time: Less than 1 sec to full scale (within ±2%), Less than 1.5 sec to any set-point (within ±2%)
    Proof Pressure: 1.0 MPa (Gauge)
    Temperature:
      Operation: 5 to 50°C
      Accuracy Guaranteed: 15 to 35°C
      Baking: 80°C
    Leak Integrity - Metal Seal: Less than 1 x 10-11 Pa x m3/s (He)
    Principle Materials:
      Valve Seat: SUS316L
      Diaphragm: YET101 (Ni-Co alloy)
      Sensor: SUS316L, Ni-brazing
    Set-Point Input: 0.1 to 5 VDC (absolute maximum rating ±15 VDC)
    Flow Signal Output: 0 to 5 VDC (max: +15 VDC, min: -15 VDC)
    Power Supply: +15 VDC (±4%) 100 mA (max. 120 mA), -15 VDC (±4%) 100 mA (max. 120 mA)
    Finish of Gas Wetted Areas: Special electropolishing
    Connection: D-subminiature (9 pin)
    Fittings: 1/4" HMJ (UJR) male
    Notes:
      1: These specifications can be guaranteed in Hitachi Metals' standard measurement condition. They may not be guaranteed in other measurement condition.

    For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $10.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination.

    Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.:

    (1) Are you the end-user of this item?

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    02/28/17