AE ADVANCED ENERGY APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO ETCH 1.5kW 13.56MHz 374V POWER-DELIVERY SYSTEM
Product Specifications
Advanced Energy Apex® RF Power-Delivery Systems
The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing. The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.
Features:
- Streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops and optional, high repetition-rate pulsing
- Industry-leading arc management
- Regulatory compliant
Benefits:
- Higher power density
- Improved process flexibility
- Increased yield
- Lower CoO
- Simplified process tool integration
- Flexible communications
Unit Specifications
Make: Advanced Energy (AE)
Model: Apex 1513
AE Part No.: 3156110-114
LAM Part No.: 660-032596-014
Rev: B, F/R: B
1.5kW, 13.56MHz, 374V
Type: RF Generator/ RF Power-Delivery System
Description
This unit is used, untested and in good physical condition (with few minor scratches/scuffs from handling). As we do not have the technical expertise to further test the unit, we are selling it on an "AS IS BASIS".
Shipping
We ship worldwide. Please email us for a shipping quote
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