Hitachi PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series

Hitachi Metals PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series

  • PART: 0190-34212
  • BIN: multi-04
  • UFS: 100 SCCM
  • GAS: N2
  • SEMI GAS: 13
  • CN: 1000

From the manufacturer:

With industry-leading flow control technology, Aera PI-980 Series pressure insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.

This innovative technology platform provides faster response, greater gas-flow stability, higher accuracy, and superior real-time process control when compared to previous technologies. High-flow stability delivers greater chamber-to-chamber process repeatability for improved production yields.

The PI-980 MFC's design integrates traditional thermal flow architecture with a pressure and temperature sensor, and NeuralStep control technology. This creates a single, compact delivery package, eliminating the need for a number of costly gas panel components traditionally utilized. Multi-gas, multi-range functionality dramatically reduces supporting inventory requirements, further enhancing cost efficiency. In addition to integrated diagnostics, this next-generation MFC technology has been combined with our field-proven D980 series product platform design to increase system uptime and make troubleshooting quick and easy.

 

Condition: Used

This used item has been inspected and appears to be in good condition. It was pulled from a working environment where it was in use and functional. Please view our photo set and contact us if you have any questions.

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We ship by most standard carriers and also offer local pick-up at our warehouse in Ventura, CA.  Please be sure to include a street address (not a PO Box) for any method other that US Postal Service. 

Large and heavy items ship by palletized freight and are delivered to the nearest truck freight terminal (for US lower 48 orders) or the nearest ocean freight seaport terminal (for International orders). Buyer must collect the goods at the terminal or make arrangements for onward delivery from that location. 

International shipping rates do not include taxes, tariffs, customs, or duties unless otherwise noted.  


If you do not see a rate in this listing please contact us and provide your ship to City and State or Country and we'll research it for you.  All items are shipped from our warehouse in Ventura, CA USA.

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We have IMMEDIATE PAYMENT required on many of our listings, so if you'd like to make an OFFER on this item and you do not see a MAKE OFFER button, please use the CONTACT SELLER link at top right under our username. ???????

30-DAY SATISFACTION GUARANTEE -Contact us with any questions or concerns and we will make it right. Our customers are our highest priority. If you are not completely satisfied with your purchase, please contact us within 30 days of your purchase and we will refund 100% of your purchase price. Returns must include all original undamaged items, in resalable condition with all original packaging (including manuals, and accessories). Media, Books, and Software are non-refundable. Shipping and Handling fees are non-refundable and the buyer is responsible for return item shipping costs.

30
Days Money Back Guarantee
Customer Satisfaction is Our Top Priority!
Satisfaction
Guaranteed
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Customer Support
Hitachi PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series

Hitachi Metals PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series

  • PART: 0190-34212
  • BIN: multi-04
  • UFS: 100 SCCM
  • GAS: N2
  • SEMI GAS: 13
  • CN: 1000

From the manufacturer:

With industry-leading flow control technology, Aera PI-980 Series pressure insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.

This innovative technology platform provides faster response, greater gas-flow stability, higher accuracy, and superior real-time process control when compared to previous technologies. High-flow stability delivers greater chamber-to-chamber process repeatability for improved production yields.

The PI-980 MFC's design integrates traditional thermal flow architecture with a pressure and temperature sensor, and NeuralStep control technology. This creates a single, compact delivery package, eliminating the need for a number of costly gas panel components traditionally utilized. Multi-gas, multi-range functionality dramatically reduces supporting inventory requirements, further enhancing cost efficiency. In addition to integrated diagnostics, this next-generation MFC technology has been combined with our field-proven D980 series product platform design to increase system uptime and make troubleshooting quick and easy.

 

Condition: Used

This used item has been inspected and appears to be in good condition. It was pulled from a working environment where it was in use and functional. Please view our photo set and contact us if you have any questions.

CLICK BELOW FOR MORE ITEMS

We have IMMEDIATE PAYMENT required on many of our listings, so if you'd like to make an OFFER on this item and you do not see a MAKE OFFER button, please use the CONTACT SELLER link at top right under our username. ???????

Shipping
Returns
Best Offers

30-DAY SATISFACTION GUARANTEE -Contact us with any questions or concerns and we will make it right. Our customers are our highest priority. If you are not completely satisfied with your purchase, please contact us within 30 days of your purchase and we will refund 100% of your purchase price. Returns must include all original undamaged items, in resalable condition with all original packaging (including manuals, and accessories). Media, Books, and Software are non-refundable. Shipping and Handling fees are non-refundable and the buyer is responsible for return item shipping costs.

We ship by most standard carriers and also offer local pick-up at our warehouse in Ventura, CA.  Please be sure to include a street address (not a PO Box) for any method other that US Postal Service. 

Large and heavy items ship by palletized freight and are delivered to the nearest truck freight terminal (for US lower 49 orders) or the nearest ocean freight seaport terminal (for International orders). Buyer must collect the goods at the terminal or make arrangements for onward delivery from that location. 

International shipping rates do not include taxes, tariffs, customs, or duties unless otherwise noted.  


If you do not see a rate in this listing please contact us and provide your ship to City and State or Country and we'll research it for you.  All items are shipped from our warehouse in Ventura, CA USA.

???????

30
Days Money Back Guarantee
Customer Satisfaction is Our Top Priority!
Customer Support
Satisfaction
Guaranteed
Fast Shipping


On Apr 14, 2024 at 13:27:05 PDT, seller added the following information:

DataCaciques