Fully Refurbished AMAT 0010-36631 (0040-32712) DcSxZ Heater Assy, 200mm AlN surplus heater with 90-day full warranty.
Phoenix Innovation specializes in ESC and heater refurbishment. 100mm, 150mm, 200mm, 300mm. Etch, PVD, CVD. Applied Materials, LAM, Novellus, TEL, etc....