Celerity Unit UFC-8565 Mass Flow Controller MFC D-Net ((CH3)3SiH/750cc) C-Seals
Manufacturer: Celerity
Model: UFC-8565
Condition: Used
Manufacturer: Celerity
Condition: Used. Comes in a non-original ESD bag. This mass flow controller is in good cosmetic condition with a few minor scuffs and scratches from normal use, but nothing major or anything that would affect function.
Notes: This flow controller was pulled from a working environment but was not tested separately after removal. No manuals, cords/cables, or additional items are included if not listed or shown.
Included:
- (1) Celerity Unit UFC-8565 Mass Flow Controller MFC
Specifications:
- Manufacturer: Celerity
- Brand: Unit
- Model: UFC-8565
- AMAT Part #: 3030-12056
- Process Gas: (CH3)3SiH (Trimethylsilane Gas)
- Flow Rate: 750cc
- Seals: Downport - C Seals
- Interface: DeviceNet (5 Pin "M8")
- Mounting Position: Horizontal or Vertical
- Footprint: 1.125"
- Surface Finish: 4µ inch Ra
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