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An ultrasonic motor uses ultrasonic vibrations (usually in a piezoelectric material) to produce a frictional driving force. This entirely new motor type has many attractive features: BL a simple structure which can easily be miniaturized, BL large power to weight ratio, BL high torque at low speed (reducing the need for gearboxes), BL high precision due to low inertia and easy electronic control, BL no associated magnetic field It has many actual and potential uses, in many cases displacing conventional electromagnetic motors: robot actuators, consumer goods (e.g. camera autofocus mechanisms), precision actuators (used in e.g. semiconductor manufacture), and aerospace devices. This book provides a completely up-to-date survey of the many different types of ultrasonic motor practically realised. It gives information on the design and manufacture of the motors as well as techniques for the evaluation of performance. It wil be an invaluable guide to this novel Japanese invention for researchers, designers



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