MSE PRO 10 mm x 10 mm 6H Semi-Insulating Type SiC, Research Grade, Silicon Carbide Crystal Substrate

10 mm x 10 mm 6H Semi-Insulating Type SiC (0001), Research Grade, Silicon Carbide Crystal Substrate, Single Side Polished, Si face CMP polished (epi ready) Product SKU# WA0337 Size 10 mm x 10 mm (+/- 1 mm) Thickness 330 um +/- 25 um (SI type) Crystal Orientation On axis: <0001> +/- 0.5 deg for 6H-SI Micropipe Density (MPD) less than 15 cm-2 Doping Concentration SI-type (V-doped): ~ 5E18/cm3 Electrical Resistivity 6H-SI >1E5 Ohm-cm Surface Roughness Unpolished (C face, marked) CMP Ra 0.5 nm (Si face) PROPERTIES OF SILICON CARBIDE CRYSTAL MATERIALS Property 4H-SiC Single Crystal 6H-SiC Single Crystal Lattice Parameters (Å) a=3.076 c=10.053 a=3.073 c=15.117 Stacking Sequence ABCB ABCACB Density 3.21 3.21 Mohs Hardness ~9.2 ~9.2 Thermal Expansion Coefficient (CTE) (/K) 4-5 x 10-6 4-5 x 10-6 Refraction Index @750nm no = 2.61 ne = 2.66 no = 2.60 ne = 2.65 Dielectric Constant c ~ 9.66 c ~ 9.66 Doping Type N-type or Semi-insulating N-type or Semi-insulating Thermal Conductivity (W/cm-K @298K) (N-type, 0.02 ohm-cm) a~4.2 c~3.7 Thermal Conductivity (W/cm-K @298K) (Semi-insulating type) a~4.9 c~3.9 a~4.6 c~3.2 Band-gap (eV) 3.23 3.02 Break-Down Electrical Field (V/cm) 3-5 x 106 3-5 x106 Saturation Drift Velocity (m/s) 2.0 x 105 2.0 x 105 Wafer and Substrate Sizes Wafers: 2, 3, 4, 6 inch; smaller substrates: 10x10, 20x20 mm, other sizes are available and can be custom-made upon request Product Grades A Grade Zero micropipe density (MPD < 1 cm-2) B Grade Production grade (MPD < 5 cm-2) C Grade Research grade (MPD < 15 cm-2) D Grade Dummy grade (MPD < 30 cm-2) Price MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter. Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications. CONTACT US today to get your quote. Customization Customized SiC crystal products can be made to meet customer's particular requirements and specifications.

MSE PRO 10 mm x 10 mm 6H Semi-Insulating Type SiC, Research Grade, Silicon Carbide Crystal Substrate

10 mm x 10 mm 6H Semi-Insulating Type SiC (0001), Research Grade, Silicon Carbide Crystal Substrate, Single Side Polished, Si face CMP polished (epi ready)

Product SKU# WA0337

Size

10 mm x 10 mm (+/- 1 mm)

Thickness

330 um +/- 25 um (SI type)

Crystal Orientation

On axis: <0001> +/- 0.5 deg for 6H-SI
Micropipe Density (MPD) less than 15 cm-2
Doping Concentration SI-type (V-doped): ~ 5E18/cm3

Electrical Resistivity

6H-SI

>1E5  Ohm-cm

Surface Roughness

Unpolished (C face, marked)

CMP Ra 0.5 nm (Si face)

 

PROPERTIES OF SILICON CARBIDE CRYSTAL MATERIALS

Property

4H-SiC Single Crystal

6H-SiC Single Crystal

Lattice Parameters (Å)

a=3.076

c=10.053

a=3.073

c=15.117

Stacking Sequence

ABCB

ABCACB

Density

3.21

3.21

Mohs Hardness

~9.2

~9.2

Thermal Expansion Coefficient (CTE) (/K)

4-5 x 10-6

4-5 x 10-6

Refraction Index @750nm

no = 2.61

ne = 2.66

no = 2.60

ne = 2.65

Dielectric Constant

c ~ 9.66

c ~ 9.66

Doping Type

N-type or Semi-insulating

N-type or Semi-insulating

Thermal Conductivity (W/cm-K @298K)

(N-type, 0.02 ohm-cm)

a~4.2

c~3.7

 

Thermal Conductivity (W/cm-K @298K)

(Semi-insulating type)

a~4.9

c~3.9

 

a~4.6

c~3.2

 

Band-gap (eV)

3.23

3.02

Break-Down Electrical Field (V/cm)

3-5 x 106

3-5 x106

Saturation Drift Velocity (m/s)

2.0 x 105

2.0 x 105

Wafer and Substrate Sizes

Wafers: 2, 3, 4, 6 inch; smaller substrates: 10x10, 20x20 mm, other sizes are available and can be custom-made upon request

Product Grades

A Grade Zero micropipe density (MPD < 1 cm-2)

B Grade Production grade (MPD < 5 cm-2)

C Grade Research grade (MPD < 15 cm-2)

D Grade Dummy grade (MPD < 30 cm-2)

 

Price

MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter. Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications. CONTACT US today to get your quote.

Customization

Customized SiC crystal products can be made to meet customer's particular requirements and specifications.

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Accepted Payment Methods

Immediate payment is required upon selecting "Buy It Now" or upon checking out through the cart.

We accept payment via U.S. PayPal accounts and all Major Credit Cards, Debit Cards & Google Pay.

We are legally required to collect sales tax in those states and localities where we maintain a physical presence (nexus).

The applicable amount of sales tax charged to an order will be calculated based on the shipment destination's state and local sales tax laws.

Thank you for shopping with us on eBay!

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Additional Information:
"Broken or damaged items must be reported immediately upon receiving your package (within 5 business days upon delivery). All materials and equipment are considered as received in good condition upon signature of delivery confirmation. Please inspect these items for damage prior to signing off on the condition. If it becomes necessary to return a damaged item to MSE Supplies, please contact us for a Return Merchandise Authorization (RMA) number within 30 days of receipt of the product. MSE Supplies must receive the product within 15 days of MSE Supplies issuing the Return Merchandise Authorization (RMA). The product must be in the original packaging or the return will be rejected. RMA numbers must appear on the packing list and items being returned must be packaged and shipped in accordance with all applicable regulation. All items are subject to a 25% restocking fee. \r\n\r\nItems not returnable for credit include: open or damaged containers; materials past their expiration date or with an expiration date too short for resale; custom or special orders; non-recurring engineering (NRE) cost charged to the order, and chemicals of any type. Any supplies or equipment that have been uséd and are being returned for a warranty repair may require that a decontamination form be filled out. Please contact MSE Supplies for this form."