Four very clean and working mass flow controllers from Porter, Model 201-DKASVBCP.  1000PSI max. press. N2 gas, 120 ML/MIN., 1/8" compression fitting ports.

Temperature Coefficent (per SEMI E18-91 Zero Effect and Span Effect): ±0.05% full scale / °C of zero

±0.05% of reading/ °C of span

Mounting Orientation: Attitude insensitive

Warm-up Time: 10 minutes

External Electrical Connector: Nine (9)- pin Dconnector

Weight (approximate): 1.2 lbs

Power Supply Requirements: (Current consumption <250 mAdc):

Voltage output models: +12 (±5%) (0-5 Vdc & 1-5 Vdc flow signal outputs only) or +15 (±10%) Vdc

Current loop models: +15 (±5%) or +24 (±15%) Vdc

Setpoint Input/Flow Signal Output: 0-5 Vdc/0-5 Vdc (2K ohm minimum load resistance)

0-10 Vdc/0-10 Vdc (3K ohm minimum load resistance) 1-5 Vdc/1-5 Vdc (2K ohm minimum load

resistance) 4-20 mAdc/4-20mAdc (refer to load resistance values below)

1-5 Vdc/4-20 mAdc (refer to load resistance values below) Load resistance values for 4-20 mAsc

flow signal output: 0-450 ohm for 6.5-15 Vdc

loop supply voltage 200-750 ohm for 15-30 Vdc loop supply voltage

Model 201 Mass Flow Instruments SPECIFICATIONS:

Flow Capacity: Any Flow range from 0-5 SCCM to 0-10 SLPM (nitrogen equivalent).

Response Time (per SEMI E17-91 Settling Time): 1 to 2 Seconds

Accuracy and Linearity: ±1% full scale

Repeatability: Within ±0.2% full scale at any constant temperature within operating temperature range

Rangeability (Control Range): 50; 1 (2%-100% full scale) (accuracy and control)

Ambient and Operating Temperature Range: 80°F / 25°C

Maximum Operating Pressure: 1000 PSIG