Here is an Advanced Energy APEX 2013 RF Generator.  This unit has been tested to full 2kW output as seen in pictures.  

Unit can be used in the original Lam Research TCP chamber application, or anywhere that 2kW of 13.558Mhz is needed.

Unit has pulsing, CEX, and is F47 compliant.

Unit comes as pictured, no additional cables or accessories included.

AE M/N: 3156113-024
Lam P/N: 660-063437-003
Input: 208VAC 3 phase
Output: 2000W @ 13.56MHz  -2kHz (13.588MHz)
Cooling: water cooled

Tested, Guaranteed Fully Functional


Additional item info:
  • No additional parts, accessories, manuals, or cables are included, unless specifically pictured and stated as part of the listing.
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International buyers:
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Returns:
  • Please double check Part Numbers, Interfaces, Software, Compatibility, and Communication Requirements BEFORE you purchase an item. 
  • Returns are ONLY accepted for Warranty and items that don't match the item description.  
  • All returns must include all original undamaged items, in resalable condition with all original packaging including manuals, warranty forms, cables, etc.
  • Please note: Warranty is Void and Returns will NOT be Accepted if Tamper Seals are Broken or Removed, or unit was connected to improper supply voltage.