Here is an Advanced Energy APEX 2013 RF Generator. This unit has been tested to full 2kW output as seen in pictures.
Unit can be used in the original Lam Research TCP chamber application, or anywhere that 2kW of 13.558Mhz is needed.
Unit has pulsing, CEX, and is F47 compliant.
Unit comes as pictured, no additional cables or accessories included.
AE M/N: 3156113-024
Lam P/N: 660-063437-003
Input: 208VAC 3 phase
Output: 2000W @ 13.56MHz -2kHz (13.588MHz)
Cooling: water cooled
Tested, Guaranteed Fully Functional
Additional item info:
- No
additional parts, accessories, manuals, or cables are included, unless
specifically pictured and stated as part of the listing.
Shipping:
- I
will ship via FedEx on your account at no additional charge. (Sorry, I
do Not ship UPS or DHL, as their service is not reliable in my area.)
- Contact me for a custom shipping quote if the shipping calculator is too high.
- If you need expedited shipping, let me know. Many times I can ship same or next day.
- I only ship to your ebay shipping address, so make sure it is correct BEFORE you purchase an item.
Payment:
- ebay Payments or Bank Wire Transfers in
USD(for purchases over $1000 USD)
Contact:
- If
you feel you have not received 5 Star service, or have any questions,
please contact me directly through ebay messages. I am more than happy
to help and resolve any issues or help with technical questions.
International buyers:
- International
buyers are responsible for all Customs, Duties, Taxes, Broker, and Any
Other Fees or Forms associated with Importing Items from the USA.
Returns:
- Please
double check Part Numbers, Interfaces, Software, Compatibility, and
Communication Requirements BEFORE you purchase an item.
- Returns are ONLY accepted for Warranty and items that don't match the item description.
- All
returns must include all original undamaged items, in resalable
condition with all original packaging including manuals, warranty forms,
cables, etc.
- Please note: Warranty is
Void and Returns will NOT be Accepted if Tamper Seals are Broken or
Removed, or unit was connected to improper supply voltage.