This product is assembled in Canada according to US and Canada standard (110V/60Hz) with strict quality control. Free shipping from Canada. Custom clearance and duties are included in the price when applicable.
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- Digital Control on LCD screen, precise rotation control with adjustable acceleration
- Robust design: Vibration free, stable spinning, low noise level
- Compact design, easy to pass antechamber of glove-box
- Powerful industrial grade 75W DC brush-less motor, reaching 10,000 RPM in a few seconds
- Micro-controller enables precise and automatic operation of the system
- Programmable 5 steps process for each recipe and 5 recipe can be stored in micro-controller
- Fully customizable vacuum chucks according to size and geometry of substrates, and coating material
- Oil-less vacuum pump included, with stand alone control and anti-slip base
- The bowl of the spin coater is removable and can be cleaned easily - Designed to prevent photoresist blocking
- High level customer service since 2009
Input power | AC 110V/60HZ or 220/50HZ, SinglePhase |
Max spin speed | 10,000 RPM |
Spin speed resolution | ±1 RPM |
Time resolution | 1 S |
Max acceleration rate | 100-9999 RPM/S |
Motor | DC |
Substrate | From fragment (≤10mm) to 4inch wafer |
Vacuum chucks included | 10mm, 25mm, and 55mm Note: substrates to be coater must be biggerthan the vacuum chuck and covers whole surface of vacuum chuck. Otherwise,photoresist may be sucked into the vacuum channels, resulting in block andserious damage. |
Vacuum requirement | 0.06-0.09MPa, flow rate ≥15L/Min |
Vacuum interface | External Dia.: 6mm; |
Product dimension | 210mm (W) x 265mm (D) x 160mm (H) |
Weight | 6 Kg |
Warranty
- Return acceptable in 14 days at its original condition and Package
- Two year standard warranty with life-time support;
- Damage due to improper storage, use, or maintenance is not covered by warranty
- Extended warranty available upon request
Partial List of Users
Brookhaven National Laboratory, Duke University, Sandia Nation Laboratory, University of Waterloo, University at Buffalo, Purdue University, Fresh Air Sensor, Texas A&M University, University of Maryland at Baltimore, University of Akron, University of Toronto, Middle Western University, Northeastern University, University of Louisiana, Carnegie Mellon University, University of Washington, Lehigh University, and Georgia State University, Technical University of Denmark, Waves Audio Ltd, Indiana University, VISITECH in Norway, Northwestern University, EMPA in Switzerland, Midlands Technical College, Allergy Amulet, Kent State University, Carnegie Mellon University, MRIGlobal, Laserinstitut Hochschule Mittweida in Germany, Iowa State University, Terabase Inc. in Japan, Kansas State University, Leticia Canales, Northern Arizon University, Sensient Technology, Ubeam, University of California in San Diego, Univeristy of Notre Dame, University of Southern Mississippi, Washington State University, Furcifer Inc., Alberta University, Arizona State University, State University of New York at Buffalo, California Institute of Technology, Carbon3D, Clemson University, Louisiana State University, Midwestern University, National Institute of Standards and Technology, Princeton International School, San Jose State University, Sero Immuno Diagnostics, State University of New York, State University of Oregon, University of Akron, University of California, University of Oregon, University of Toronto, USARL, Hazen Research, UMS GmbH & Co.KG
Additional Notes
1. The item will be shipped in 3-5 business days
2. Free shipping for US and Canada using DHL, duty and custom clearance included in the price when applicable
3. Accept custom OEM if there are any special requirements for your application