Understanding MEMS : Principles and Applications, Hardcover by Castaner, Luis, ISBN 1119055423, ISBN-13 9781119055426, Brand New, Free shipping in the US

This text explains the principles and applications of MEMS (microelectromechanical systems) to various technologies. It covers scaling of forces, elasticity, bending of microstructures, piezoresistance and piezoelectricity, electrostatic driving and sensing, resonators, microfluidics and electrokinetics, thermal devices, and fabrication. It integrates analytical solutions using Matlab and PSpice. Annotation ©2016 Ringgold, Inc., Portland, OR ()